Semiconductor Cooling Fluid Management System
These cooling fluids are fluorinated coolants (such as Galden and Fluorinert) and feature corrosion resistance, electrical insulation, and temperature stability.
However, when operated at high temperatures over extended periods, prolonged thermal and chemical exposure can cause the coolant to degrade into toxic oxidation byproducts (fluorinated compounds), leading to product oxidation and environmental contamination.
In addition, during low-temperature operation, moisture (H₂O) mixed into the coolant can result in chiller performance degradation, such as compressor icing and unintended temperature rise.
Prevents external leakage of oxidized substances generated during coolant overheating. Suppresses coolant evaporation and enables recovery to prevent atmospheric release (reduction of greenhouse gas emissions)
A core auxiliary device that removes moisture and acidic components from the coolant, enhancing system reliability and extending chiller service life
– Prevents moisture generation in low-temperature coolants and blocks external ingress
Extends coolant service life
– Detects coolant oxidation, prevents natural evaporation, and enables coolant recovery during high-temperature evaporation
Compliance with Industrial Safety and Health Regulations (Chemical Substances)
– Blocks direct external leakage of oxidized coolant substances, ensuring safety and maintaining equipment performance
– Reduced MTTR (Mean Time To Repair)
– Lower maintenance and operating costs
Simultaneous Use of Moisture Management Systems / Maximum Efficiency & Optimized Operation
– Gas-phase moisture removal
Removal of various acidic byproducts generated during long-term coolant operation
– Liquid-phase moisture removal
| Category | HF Concentration | Relative Uncer tainty |
| C-Saver IN | 548 ppm | ±1% |
| C-Saver OUT | 0 ppm | ±1% |
| Category | HF Concentration | Relative Uncer tainty |
| C-Saver IN | 401 ppm | ±1% |
| C-Saver OUT | 25 ppm | ±1% |
| Category | HF Concentration | Relative Uncer tainty |
| C-Saver IN | 173 ppm | ±1% |
| C-Saver OUT | 35 ppm | ±1% |
| Category | HF Concentration | Relative Uncer tainty |
| C-Saver IN | 360 ppm | ±1% |
| C-Saver OUT | 0 ppm | ±1% |
FUME FILTER